Method to obtain nonuniformity information from field emission behavior
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Published:2010-05
Issue:3
Volume:28
Page:441-449
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ISSN:2166-2746
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Container-title:Journal of Vacuum Science & Technology B, Nanotechnology and Microelectronics: Materials, Processing, Measurement, and Phenomena
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language:en
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Short-container-title:Journal of Vacuum Science & Technology B, Nanotechnology and Microelectronics: Materials, Processing, Measurement, and Phenomena
Author:
Dall’Agnol Fernando F.,de Paulo Alexandre C.,Paredez Pablo,den Engelsen Daniel,Santos Thebano E. A.,Mammana Victor P.
Publisher
American Vacuum Society
Subject
Materials Chemistry,Electrical and Electronic Engineering,Surfaces, Coatings and Films,Process Chemistry and Technology,Instrumentation,Electronic, Optical and Magnetic Materials