Resonant sputtered neutral mass spectrometry using multiple reflections of laser to counterbalance Doppler broadening-Reference-Cited by-同舟云学术

Resonant sputtered neutral mass spectrometry using multiple reflections of laser to counterbalance Doppler broadening

Published:2020-05 Issue:3 Volume:38 Page:034001
ISSN:2166-2746
Container-title:Journal of Vacuum Science & Technology B
language:en
Short-container-title:Journal of Vacuum Science & Technology B

Author:

Zhao Yue¹^ORCID,Ohmori Yuzuka²,Miyashita Yuta²,Morita Masato²³,Sakamoto Tetsuo²³,Kato Kotaro⁴,Sonnenschein Volker⁴^ORCID,Tomita Hideki⁴^ORCID,Kawai Toshihide⁵,Okumura Takeo⁵,Satou Yukihiko⁶,Miyabe Masabumi⁷,Wakaida Ikuo⁷

Affiliation:

1. Collabarative Open Research Center, Kogakuin University, 2665-1 Nakano, Hachioji, Tokyo 192-0015, Japan

2. Graduate School of Electric Engineering and Electronics, Kogakuin University, 2665-1, Nakano, Hachioji, Tokyo 192-0015, Japan

3. Department of Applied Physics, Kogakuin University, 2665-1, Nakano, Hachioji, Tokyo 192-0015, Japan

4. Department of Energy Engineering, Nagoya University, Furo-cho, Chikusa-ku, Nagoya 464-8603, Japan

5. Japan Neutron Optics Inc., 20-5, Takeshima-cho, Gamagori-shi, Aichi 443-0031, Japan

6. Collaborative Laboratories for Advanced Decommissioning Science, Japan Atomic Energy Agency, 790-1 Motooka-Otsuka, Tomioka-machi, Futaba-gun, Fukushima 979-1195, Japan

7. Japan Atomic Energy Agency, 2-2, Uchisaiwaicho, Chiyoda, Tokyo 100-0011, Japan

Funder

Japan Science and Technology Agency

Publisher

American Vacuum Society

Subject

Materials Chemistry,Electrical and Electronic Engineering,Surfaces, Coatings and Films,Process Chemistry and Technology,Instrumentation,Electronic, Optical and Magnetic Materials

Link

http://avs.scitation.org/doi/pdf/10.1116/6.0000012

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