Novel method for producing nanostructures in silicon inversion layers
-
Published:1995-05
Issue:3
Volume:13
Page:1135
-
ISSN:0734-211X
-
Container-title:Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures
-
language:
-
Short-container-title:J. Vac. Sci. Technol. B
Publisher
American Vacuum Society
Subject
General Engineering