An electron image projection stepper
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Published:1986-01
Issue:1
Volume:4
Page:100
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ISSN:0734-211X
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Container-title:Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures
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language:
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Short-container-title:J. Vac. Sci. Technol. B
Publisher
American Vacuum Society
Subject
General Engineering
Cited by
3 articles.
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1. Forming Electron Beams of Submicron Cross Section;The Physics of Submicron Lithography;1992
2. A 1:1 MIM cathode electron-projection stepper;Microelectronic Engineering;1990-04
3. A 1:1 electron stepper;Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures;1989-11