Surface morphology control of Nb thin films by biased target ion beam deposition-Reference-Cited by-同舟云学术

Surface morphology control of Nb thin films by biased target ion beam deposition

Published:2018-05 Issue:3 Volume:36 Page:031507
ISSN:0734-2101
Container-title:Journal of Vacuum Science & Technology A: Vacuum, Surfaces, and Films
language:en
Short-container-title:Journal of Vacuum Science & Technology A: Vacuum, Surfaces, and Films

Author:

Kittiwatanakul Salinporn¹,Anuniwat Nattawut²,Dao Nam³,Wolf Stuart A.²,Lu Jiwei³

Affiliation:

1. Department of Materials Science and Engineering, University of Virginia, Charlottesville, Virginia 22904 and Department of Physics, Faculty of Science, Chulalongkorn University, Bangkok 10330, Thailand

2. Department of Physics, University of Virginia, Charlottesville, Virginia 22904

3. Department of Materials Science and Engineering, University of Virginia, Charlottesville, Virginia 22904

Funder

Northrop Grumman

Intelligence Advanced Research Projects Activity

Publisher

American Vacuum Society

Subject

Surfaces, Coatings and Films,Surfaces and Interfaces,Condensed Matter Physics

Link

http://avs.scitation.org/doi/pdf/10.1116/1.5023723

Cited by 8 articles. 订阅此论文施引文献订阅此论文施引文献，注册后可以免费订阅5篇论文的施引文献，订阅后可以查看论文全部施引文献

1. Effects of residual oxygen on superconducting niobium films;Applied Physics Letters;2024-09-09

2. CuxOy nanoparticle fabrication: Synthesis, characterization, and applications;Materials Science and Engineering: B;2024-05

3. Cryogenic Electronics and Quantum Information Processing;2021 IEEE International Roadmap for Devices and Systems Outbriefs;2021-11

4. Comparison of deposition techniques for Mo/Si reflective multilayers for EUV mask blanks;International Conference on Extreme Ultraviolet Lithography 2021;2021-10-12

5. Investigation of Microwave Loss Induced by Oxide Regrowth in High- Q Niobium Resonators;Physical Review Applied;2021-07-08