Electron beam deposition of cobalt on the silicon substrate: Experiment and simulation-Reference-Cited by-同舟云学术

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Electron beam deposition of cobalt on the silicon substrate: Experiment and simulation

Published:2021-12 Issue:6 Volume:39 Page:064201
ISSN:2166-2746
Container-title:Journal of Vacuum Science & Technology B
language:en
Short-container-title:Journal of Vacuum Science & Technology B

Author:

L'vov Pavel E.¹²^ORCID,Bulyarskiy Sergey V.²^ORCID,Saurov Alexander N.²,Svetukhin Vyacheslav V.³,Terentyev Alexey I.²

Affiliation:

1. Ulyanovsk State University, Ulyanovsk 432017, Russia

2. Institute of Nanotechnology of Microelectronics of the Russian Academy of Science, Moscow 119991, Russia

3. Scientific-Manufacturing Complex Technological Centre, Moscow, Zelenograd 124498, Russia

Funder

Ministry of Science and Higher Education of the Russian Federation

Publisher

American Vacuum Society

Subject

Materials Chemistry,Electrical and Electronic Engineering,Surfaces, Coatings and Films,Process Chemistry and Technology,Instrumentation,Electronic, Optical and Magnetic Materials

Link

https://avs.scitation.org/doi/pdf/10.1116/6.0001223

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1. Influence of the roughness of the barrier layer on the formation of nanoparticles of the catalyst for the growth of carbon nanotubes;Materials Chemistry and Physics;2023-01

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