Oxygen plasma induced degradation in InGaAs/InP heterostructures
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Published:2000
Issue:6
Volume:18
Page:2799
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ISSN:0734-211X
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Container-title:Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures
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language:en
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Short-container-title:J. Vac. Sci. Technol. B
Author:
Driad R.,McKinnon W. R.,McAlister S. P.
Publisher
American Vacuum Society
Subject
General Engineering