In situ substrate temperature measurements during radio frequency sputtering of ZnO thin film using fiber Bragg grating
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Published:1999-05
Issue:3
Volume:17
Page:871-876
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ISSN:0734-2101
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Container-title:Journal of Vacuum Science & Technology A: Vacuum, Surfaces, and Films
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language:en
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Short-container-title:Journal of Vacuum Science & Technology A: Vacuum, Surfaces, and Films
Author:
Zayer N. K.,Henderson P. J.,Grellier A. J. C.,Pannell C. N.
Publisher
American Vacuum Society
Subject
Surfaces, Coatings and Films,Surfaces and Interfaces,Condensed Matter Physics