Crystallization and microstructure evolution of nanoscale NiTi thin films prepared by biased target ion beam deposition-Reference-Cited by-同舟云学术

Crystallization and microstructure evolution of nanoscale NiTi thin films prepared by biased target ion beam deposition

Published:2016-01 Issue:1 Volume:34 Page:010601
ISSN:2166-2746
Container-title:Journal of Vacuum Science & Technology B, Nanotechnology and Microelectronics: Materials, Processing, Measurement, and Phenomena
language:en
Short-container-title:Journal of Vacuum Science & Technology B, Nanotechnology and Microelectronics: Materials, Processing, Measurement, and Phenomena

Author:

Hou Huilong¹,Hamilton Reginald F.¹,Horn Mark W.¹

Affiliation:

1. Department of Engineering Science and Mechanics, The Pennsylvania State University, University Park, Pennsylvania 16802

Funder

National Science Foundation (NSF)

Publisher

American Vacuum Society

Subject

Materials Chemistry,Electrical and Electronic Engineering,Surfaces, Coatings and Films,Process Chemistry and Technology,Instrumentation,Electronic, Optical and Magnetic Materials

Link

http://avs.scitation.org/doi/pdf/10.1116/1.4936392

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1. Influence of polyimide substrates on the composition, morphology, and crystalline nature of sputter-deposited NiTi thin films;Sensors and Actuators A: Physical;2023-08

2. Effect of low temperature annealing on the properties of nano Ni–Ti alloys;Materials Research Express;2019-09-06

3. Biased Target Ion Beam Deposition and Nanoskiving for Fabricating NiTi Alloy Nanowires;Shape Memory and Superelasticity;2016-11-29

4. Crystallization of nanoscale NiTi alloy thin films using rapid thermal annealing;Journal of Vacuum Science & Technology B, Nanotechnology and Microelectronics: Materials, Processing, Measurement, and Phenomena;2016-11