Smart thin film TiNi/piezoelectric heterostructures-Reference-Cited by-同舟云学术

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Smart thin film TiNi/piezoelectric heterostructures

Published:1995-05 Issue:3 Volume:13 Page:1017-1021
ISSN:0734-2101
Container-title:Journal of Vacuum Science & Technology A: Vacuum, Surfaces, and Films
language:en
Short-container-title:Journal of Vacuum Science & Technology A: Vacuum, Surfaces, and Films

Author:

Mercado P. G.,Jardine A. P.

Publisher

American Vacuum Society

Subject

Surfaces, Coatings and Films,Surfaces and Interfaces,Condensed Matter Physics

Link

http://avs.scitation.org/doi/pdf/10.1116/1.579391

Cited by 14 articles. 订阅此论文施引文献订阅此论文施引文献，注册后可以免费订阅5篇论文的施引文献，订阅后可以查看论文全部施引文献

1. Dielectric and optical properties of zirconium titanate thin films by reactive DC magnetron co-sputtering;IEEE Transactions on Dielectrics and Electrical Insulation;2019-08

2. Vibration Damping Materials and Their Applications in Nano/Micro-Electro-Mechanical Systems: A Review;Journal of Nanoscience and Nanotechnology;2015-03-01

3. NiTi/Pb(Zr0.52Ti0.48)O3 thin film heterostructures for vibration damping in MEMS;Sensors and Actuators A: Physical;2013-04

4. Surface modification of NiTi/PZT heterostructure thin films using various protective layers for potential MEMS applications;Surface and Coatings Technology;2011-12

5. Structural, electrical and mechanical properties of magnetron sputtered NiTi/PZT/TiOx thin film heterostructures;Surface and Coatings Technology;2011-02

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