Scanning Auger of a specific via interface in an integrated circuit using a novel focused ion beam sample preparation technique
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Published:2009-07
Issue:4
Volume:27
Page:738-742
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ISSN:0734-2101
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Container-title:Journal of Vacuum Science & Technology A: Vacuum, Surfaces, and Films
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language:en
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Short-container-title:Journal of Vacuum Science & Technology A: Vacuum, Surfaces, and Films
Author:
Liu W.,Ramirez H.,Schauer S.,Theodore N. D.
Publisher
American Vacuum Society
Subject
Surfaces, Coatings and Films,Surfaces and Interfaces,Condensed Matter Physics