Study on strain and piezoelectric polarization of AlN thin films grown on Si-Reference-Cited by-同舟云学术

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Study on strain and piezoelectric polarization of AlN thin films grown on Si

Published:2005-07 Issue:4 Volume:23 Page:628-630
ISSN:0734-2101
Container-title:Journal of Vacuum Science & Technology A: Vacuum, Surfaces, and Films
language:en
Short-container-title:Journal of Vacuum Science & Technology A: Vacuum, Surfaces, and Films

Author:

Deng Yongzhen,Kong Yuechan,Zheng Youdou,Zhou Chunhong,Xi Dongjuan,Chen Peng,Gu Shulin,Shen Bo,Zhang Rong,Han Ping,Jiang Ruolian,Shi Yi

Publisher

American Vacuum Society

Subject

Surfaces, Coatings and Films,Surfaces and Interfaces,Condensed Matter Physics

Link

http://avs.scitation.org/doi/pdf/10.1116/1.1927533

Cited by 15 articles. 订阅此论文施引文献订阅此论文施引文献，注册后可以免费订阅5篇论文的施引文献，订阅后可以查看论文全部施引文献

1. 2-inch semi-polar (112̄2) AlN templates prepared by high-temperature hydride vapor phase epitaxy;CrystEngComm;2024

2. Recent Advancements in GaN LED Technology;Light-Emitting Diodes - New Perspectives;2023-02-22

3. Residual stress analysis of aluminum nitride piezoelectric micromachined ultrasonic transducers using Raman spectroscopy;Journal of Applied Physics;2021-07-28

4. Temperature Dependence of Stress and Optical Properties in AlN Films Grown by MOCVD;Nanomaterials;2021-03-10

5. InGaN/GaN Multiple Quantum Wells Materials as Well as Blue and Green LEDs;Springer Series in Materials Science;2020

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