Process-dependent electronic states at Mo/hafnium oxide/Si interfaces
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Published:2007-07
Issue:4
Volume:25
Page:1261-1266
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ISSN:0734-2101
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Container-title:Journal of Vacuum Science & Technology A: Vacuum, Surfaces, and Films
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language:en
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Short-container-title:Journal of Vacuum Science & Technology A: Vacuum, Surfaces, and Films
Author:
Walsh S.,Fang L.,Schaeffer J. K.,Brillson L. J.
Publisher
American Vacuum Society
Subject
Surfaces, Coatings and Films,Surfaces and Interfaces,Condensed Matter Physics