Effect of oxygen flow rate on the low temperature deposition of titanium monoxide thin films via electron beam evaporation-Reference-Cited by-同舟云学术

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Effect of oxygen flow rate on the low temperature deposition of titanium monoxide thin films via electron beam evaporation

Published:2019-05 Issue:3 Volume:37 Page:031505
ISSN:0734-2101
Container-title:Journal of Vacuum Science & Technology A
language:en
Short-container-title:Journal of Vacuum Science & Technology A

Author:

Cosar Mustafa Burak¹²³,Icli Kerem Cagatay³⁴,Ozenbas Macit¹³^ORCID

Affiliation:

1. Metallurgical and Materials Engineering Department, Middle East Technical University, Universiteler Mah. Dumlupinar Blv. No:1, Cankaya, Ankara 06800, Turkey

2. Aselsan Inc. Microelectronics Guidance and Electro-Optics Division, Cankırı Yolu 7. Km, Akyurt, Ankara 06750, Turkey

3. Center for Solar Energy Research and Applications (GUNAM), Middle East Technical University, Universiteler Mah. Dumlupinar Blv. No:1, Cankaya, Ankara 06800, Turkey

4. Micro and Nanotechnology Graduate Program, Middle East Technical University, Universiteler Mah. Dumlupinar Blv. No:1, Cankaya, Ankara 06800, Turkey

Funder

Reearch Fund of the Middle East Technical University

Publisher

American Vacuum Society

Subject

Surfaces, Coatings and Films,Surfaces and Interfaces,Condensed Matter Physics

Link

http://avs.scitation.org/doi/pdf/10.1116/1.5082166

Cited by 1 articles. 订阅此论文施引文献订阅此论文施引文献，注册后可以免费订阅5篇论文的施引文献，订阅后可以查看论文全部施引文献

1. Rock-salt Ti_1−xO → rutile TiO_2−x transformation twinning via pulsed laser deposition – implications for the dense (hkl)-specific phase change and optoelectronic properties;CrystEngComm;2024

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