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2. Bilayer SiNX/Diamond Films for X-Ray Lithography Mask;Japanese Journal of Applied Physics;1999-11-15
3. Characteristics of chemical vapor deposition diamond films for x-ray mask substrates;Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures;1999
4. Fabrication of x-ray mask from a diamond membrane and its evaluation;Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures;1998-09
5. Use of oxygen gas in diamond film growth for improving stress and crystallinity properties of an x-ray mask;Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures;1998-05