Energy spectra of secondary neutrals obtained by means of the electrostatic energy filter of a commercial low-pressure HF-plasma secondary neutral mass spectrometer
Author:
Publisher
American Vacuum Society
Subject
Surfaces, Coatings and Films,Surfaces and Interfaces,Condensed Matter Physics
Link
http://avs.scitation.org/doi/pdf/10.1116/1.580861
Cited by 4 articles. 订阅此论文施引文献 订阅此论文施引文献，注册后可以免费订阅5篇论文的施引文献，订阅后可以查看论文全部施引文献
1. Ion-surface interactions on c-Si(001) at the radiofrequency-powered electrode in low-pressure plasmas:Ex situspectroscopic ellipsometry and Monte Carlo simulation study;Journal of Vacuum Science & Technology A: Vacuum, Surfaces, and Films;2006-01
2. Al and Ti secondary neutral and secondary ion emission from oxide samples in the high-frequency sputtering mode of HF-plasma SNMS;Fresenius' Journal of Analytical Chemistry;2000-01-14
3. Low-energy BO and BO2 emission from H2BO3 sputtered in a low-pressure high-frequency SNMS plasma;Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms;1999-07
4. On tertiary BO x ± ions in HF-plasma SNMS;Fresenius' Journal of Analytical Chemistry;1998-08-03
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