Characterization of scanning probe microscope tips for linewidth measurement
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Published:1991-11
Issue:6
Volume:9
Page:3586
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ISSN:0734-211X
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Container-title:Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures
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language:
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Short-container-title:J. Vac. Sci. Technol. B
Publisher
American Vacuum Society
Subject
General Engineering
Cited by
58 articles.
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1. Characterizing Atomic Force Microscopy Tip Shape in Use;Journal of Nanoscience and Nanotechnology;2009-02-01
2. Atomic Force Microscopy of Polymer Films;Advances in Chemical Physics;2007-03-14
3. Scanning force microscopy-calibrative procedures for ‘best practice’;Scanning;2006-12-07
4. Nanotips: Growth, Model, and Applications;Critical Reviews in Solid State and Materials Sciences;2006-08
5. References;Scanning Probe Microscopes;2003-02-26