Planarization of high aspect ratio p-i-n diode pillar arrays for blanket electrical contacts-Reference-Cited by-同舟云学术

Planarization of high aspect ratio p-i-n diode pillar arrays for blanket electrical contacts

Published:2010-09 Issue:5 Volume:28 Page:916-920
ISSN:2166-2746
Container-title:Journal of Vacuum Science & Technology B, Nanotechnology and Microelectronics: Materials, Processing, Measurement, and Phenomena
language:en
Short-container-title:Journal of Vacuum Science & Technology B, Nanotechnology and Microelectronics: Materials, Processing, Measurement, and Phenomena

Author:

Voss L. F.,Shao Q.,Reinhardt C. E.,Graff R. T.,Conway A. M.,Nikolić R. J.,Deo Nirmalendu,Cheung Chin Li

Publisher

American Vacuum Society

Subject

Materials Chemistry,Electrical and Electronic Engineering,Surfaces, Coatings and Films,Process Chemistry and Technology,Instrumentation,Electronic, Optical and Magnetic Materials

Link

http://avs.scitation.org/doi/pdf/10.1116/1.3478306

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