Grain boundary diffusion of phosphorus in polycrystalline silicon-Reference-Cited by-同舟云学术

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Grain boundary diffusion of phosphorus in polycrystalline silicon

Published:1982-05 Issue:1 Volume:21 Page:19-22
ISSN:0022-5355
Container-title:Journal of Vacuum Science and Technology
language:en
Short-container-title:Journal of Vacuum Science and Technology

Author:

Holloway P. H.

Publisher

American Vacuum Society

Subject

General Engineering

Link

http://avs.scitation.org/doi/pdf/10.1116/1.571713

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