Characterization and improvement of the layer uniformity for large-area quantum well device arrays grown in an Intevac/Varian Gen II molecular beam epitaxy system
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Published:1994-03
Issue:2
Volume:12
Page:1086
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ISSN:0734-211X
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Container-title:Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures
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language:
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Short-container-title:J. Vac. Sci. Technol. B
Author:
Svensson Stefan P.
Publisher
American Vacuum Society
Subject
General Engineering
Cited by
6 articles.
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