Mixtures of poly (2,3−dichloro−1−propyl acrylate) and poly (Glycidyl methacrylate−co−ethyl acrylate) as an x‐ray resist with improved adhesion-Reference-Cited by-同舟云学术

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Mixtures of poly (2,3−dichloro−1−propyl acrylate) and poly (Glycidyl methacrylate−co−ethyl acrylate) as an x‐ray resist with improved adhesion

Published:1979-11 Issue:6 Volume:16 Page:2014-2019
ISSN:0022-5355
Container-title:Journal of Vacuum Science and Technology
language:en
Short-container-title:Journal of Vacuum Science and Technology

Author:

Moran J. M.,Taylor G. N.

Publisher

American Vacuum Society

Subject

General Engineering

Link

http://avs.scitation.org/doi/pdf/10.1116/1.570332

Cited by 16 articles. 订阅此论文施引文献订阅此论文施引文献，注册后可以免费订阅5篇论文的施引文献，订阅后可以查看论文全部施引文献

1. Biocatalytic preparation of dichloropropyl acrylates. Application to the synthesis of poly(dichloropropyl acrylates);Journal of Molecular Catalysis B: Enzymatic;2013-08

2. Negative Radiation Resists;Semiconductor Lithography;1988

3. Radiation damage effects in boron nitride mask membranes subjected to x-ray exposures;Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures;1987-01

4. Chloromethylated Poly(naphthyl methacrylate) as Electron Beam and Photo Resist;Polymer Journal;1984-05

5. Plasma Sources for X-Ray Lithography;Plasma Processing for VLSI;1984

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