Author:
Carlström C. F.,Anand S.,Landgren G.
Cited by
2 articles.
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1. Characterization of damage in InP dry etched using nitrogen containing chemistries;Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures;2001
2. Polymer free reactive ion beam etching of InP using N/sub 2//(CH/sub 3/)/sub 3/N;Conference Proceedings. 2000 International Conference on Indium Phosphide and Related Materials (Cat. No.00CH37107)