Summary Abstract: Physical aspects of gaseous field ion beam current stability
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Published:1987-01
Issue:1
Volume:5
Page:195
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ISSN:0734-211X
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Container-title:Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures
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language:
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Short-container-title:J. Vac. Sci. Technol. B
Publisher
American Vacuum Society
Subject
General Engineering
Cited by
6 articles.
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1. Progress in electron- and ion-interferometry;Reports on Progress in Physics;2009-12-23
2. High‐field ion sources and applicationsa);Review of Scientific Instruments;1992-05
3. High‐field ion sources;Review of Scientific Instruments;1990-01
4. Current-voltage characteristics of a gas field ion source;Applied Physics B Photophysics and Laser Chemistry;1988-08
5. Emission characteristics and stability of a helium field ion source;Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures;1988-05