Thin-film metrology of tilted and curved surfaces by imaging Mueller-matrix ellipsometry-Reference-Cited by-同舟云学术

Thin-film metrology of tilted and curved surfaces by imaging Mueller-matrix ellipsometry

Published:2019-11 Issue:6 Volume:37 Page:062908
ISSN:2166-2746
Container-title:Journal of Vacuum Science & Technology B
language:en
Short-container-title:Journal of Vacuum Science & Technology B

Author:

Duwe Matthias¹,Quast Jan-Henrik¹,Schneider Stefan¹,Fischer Daniel²,Beck Uwe²

Affiliation:

1. Accurion GmbH, Stresemannstraße 30, 37079 Göttingen, Germany

2. BAM—Bundesanstalt für Materialforschung und -prüfung, Unter den Eichen 44-46, 12203 Berlin, Germany

Funder

Central Innovation Program for small and medium-sized enterprises

Publisher

American Vacuum Society

Subject

Materials Chemistry,Electrical and Electronic Engineering,Surfaces, Coatings and Films,Process Chemistry and Technology,Instrumentation,Electronic, Optical and Magnetic Materials

Link

http://avs.scitation.org/doi/pdf/10.1116/1.5122757

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