Crystalline SiC thin films deposited at room temperature using pulsed laser ablation of graphite and magnetron sputtering of silicon-Reference-Cited by-同舟云学术

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Crystalline SiC thin films deposited at room temperature using pulsed laser ablation of graphite and magnetron sputtering of silicon

Published:1999-05 Issue:3 Volume:17 Page:909-916
ISSN:0734-2101
Container-title:Journal of Vacuum Science & Technology A: Vacuum, Surfaces, and Films
language:en
Short-container-title:Journal of Vacuum Science & Technology A: Vacuum, Surfaces, and Films

Author:

Nainaparampil Josekutty J.,Zabinski Jeffrey S.

Publisher

American Vacuum Society

Subject

Surfaces, Coatings and Films,Surfaces and Interfaces,Condensed Matter Physics

Link

http://avs.scitation.org/doi/pdf/10.1116/1.581663

Cited by 15 articles. 订阅此论文施引文献订阅此论文施引文献，注册后可以免费订阅5篇论文的施引文献，订阅后可以查看论文全部施引文献

1. Transformation from amorphous to nano-crystalline SiC thin films prepared by HWCVD technique without hydrogen dilution;Bulletin of Materials Science;2015-09

2. Ni and Ti diffusion barrier layers between Ti–Si–C and Ti–Si–C–Ag nanocomposite coatings and Cu-based substrates;Surface and Coatings Technology;2012-01

3. High-rate deposition of amorphous and nanocomposite Ti–Si–C multifunctional coatings;Surface and Coatings Technology;2010-10

4. Optical constants of silicon carbide deposited with emerging PVD techniques;SPIE Proceedings;2009-05-07

5. Pulsed laser deposition of SiC thin films at medium substrate temperatures;Thin Solid Films;2008-07

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