Summary Abstract: Ion‐beam sputter deposition of oxide films-Reference-Cited by-同舟云学术

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Summary Abstract: Ion‐beam sputter deposition of oxide films

Published:1985-05 Issue:3 Volume:3 Page:656-656
ISSN:0734-2101
Container-title:Journal of Vacuum Science & Technology A: Vacuum, Surfaces, and Films
language:en
Short-container-title:Journal of Vacuum Science & Technology A: Vacuum, Surfaces, and Films

Author:

Sites J. R.,Demiryont H.,Kerwin D. B.

Publisher

American Vacuum Society

Subject

Surfaces, Coatings and Films,Surfaces and Interfaces,Condensed Matter Physics

Link

http://avs.scitation.org/doi/pdf/10.1116/1.572972

Cited by 16 articles. 订阅此论文施引文献订阅此论文施引文献，注册后可以免费订阅5篇论文的施引文献，订阅后可以查看论文全部施引文献

1. Characterization of zirconia– and niobia–silica mixture coatings produced by ion-beam sputtering;Applied Optics;2010-12-10

2. Complex study of zirconia-silica and niobia-silica composite coatings produced by ion beam sputtering;SPIE Proceedings;2010-10-13

3. Advanced ion beam technology for versatile oxide thin film formation;Current Applied Physics;2007-07

4. X-ray photoelectron spectroscopy study of thin TiO_2 films cosputtered with Al;Applied Optics;2006-06-20

5. Variation of the deposition rate during ion beam sputter deposition of optical thin films;Thin Solid Films;2005-07

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