Defect study in GaAs bombarded by low-energy focused ion beams

Author:

Gamo Kenji

Publisher

American Vacuum Society

Subject

General Engineering

Cited by 30 articles. 订阅此论文施引文献 订阅此论文施引文献,注册后可以免费订阅5篇论文的施引文献,订阅后可以查看论文全部施引文献

1. Role of ion beams and their energies in the properties of zinc tin phosphide thin films;Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms;2023-01

2. Two-dimensional ordered growth of InAs nanowires assisted by randomly deposited silver nanoparticles on a topographically modified surface by a focused ion beam;Applied Surface Science;2019-11

3. Focused Ion Beam nano-patterning from traditional applications to single ion implantation perspectives;Nanofabrication;2014-01-01

4. Focused ion beam patterning of III–V crystals at low temperature: A method for improving the ion-induced defect localization;Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures;2000

5. Metallization-induced damage in III–V semiconductors;Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures;1998-11

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