Application of machine learning to spectrum and image data

Author:

Aoyagi Satoka1ORCID

Affiliation:

1. Faculty of Science and Technology, Seikei University , 3-3-1 Kichijoji-Kitamachi, Musashino-shi, Tokyo 180-8633 Japan

Abstract

Machine learning is a useful tool when extracting hidden information from complex measurement data obtained via surface analysis, as in secondary ion mass spectrometry. Flexible learning methods often require significant effort to adjust parameters, as these parameters may have a significant effect on results. However, machine learning methods enable the extraction of new information that cannot be found by manual analysis. This paper presents some examples of complex data analyses using conventional multivariate analysis methods based on linear combinations (principal component analysis and multivariate curve resolution), an unsupervised learning method based on artificial neural networks (sparse autoencoder), and a supervised learning method based on decision trees (random forest). To obtain reproducible and useful results from machine learning applications to surface analysis data, the preparation of data sets—including the selection of variables and the raw data conversion process—is crucial. Moreover, sufficient information representing analytical purposes, such as the chemical structures of unknown samples, material types, and physical or chemical properties of particular materials, must be contained in the data set for supervised learning.

Publisher

American Vacuum Society

Subject

Surfaces, Coatings and Films,Surfaces and Interfaces,Condensed Matter Physics

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