Effects of post-annealing temperature and oxygen concentration during sputtering on the structural and optical properties of β-Ga2O3 films-Reference-Cited by-同舟云学术

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Effects of post-annealing temperature and oxygen concentration during sputtering on the structural and optical properties of β-Ga2O3 films

Published:2016-11 Issue:6 Volume:34 Page:060602
ISSN:0734-2101
Container-title:Journal of Vacuum Science & Technology A: Vacuum, Surfaces, and Films
language:en
Short-container-title:Journal of Vacuum Science & Technology A: Vacuum, Surfaces, and Films

Author:

Dong Linpeng,Jia Renxu,Xin Bin,Zhang Yuming

Publisher

American Vacuum Society

Subject

Surfaces, Coatings and Films,Surfaces and Interfaces,Condensed Matter Physics

Link

http://avs.scitation.org/doi/pdf/10.1116/1.4963376

Cited by 83 articles. 订阅此论文施引文献订阅此论文施引文献，注册后可以免费订阅5篇论文的施引文献，订阅后可以查看论文全部施引文献

1. Epitaxial Growth of Ga2O3: A Review;Materials;2024-08-28

2. Improvements in Resistive and Capacitive Switching Behaviors in Ga2O3 Memristors via High-Temperature Annealing Process;Materials;2024-06-04

3. RF magnetron sputtering of Ga2O3 thin films: Analysis of thermal annealing induced tuning of structural, optical characteristics, and energy band alignments;Materials Science in Semiconductor Processing;2024-05

4. Deposition and Optical Characterization of Sputter Deposited p-Type Delafossite CuGaO2 Thin Films Using Cu2O and Ga2O3 Targets;Materials;2024-04-01

5. Theoretical approach to defect-induced magnetism in oxygen-deficient γ-Ga2O3 films;Materials Chemistry and Physics;2024-02

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