Sputter deposition of thermochromic VO2films on In2O3:Sn, SnO2, and glass: Structure and composition versus oxygen partial pressure-Reference-Cited by-同舟云学术

Sputter deposition of thermochromic VO2films on In2O3:Sn, SnO2, and glass: Structure and composition versus oxygen partial pressure

Published:2015-05 Issue:3 Volume:33 Page:031805
ISSN:2166-2746
Container-title:Journal of Vacuum Science & Technology B, Nanotechnology and Microelectronics: Materials, Processing, Measurement, and Phenomena
language:en
Short-container-title:Journal of Vacuum Science & Technology B, Nanotechnology and Microelectronics: Materials, Processing, Measurement, and Phenomena

Author:

Montero José,Ji Yu-Xia,Li Shu-Yi,Niklasson Gunnar A.,Granqvist Claes G.

Publisher

American Vacuum Society

Subject

Materials Chemistry,Electrical and Electronic Engineering,Surfaces, Coatings and Films,Process Chemistry and Technology,Instrumentation,Electronic, Optical and Magnetic Materials

Link

http://avs.scitation.org/doi/pdf/10.1116/1.4918714

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