Review Article: Plasma–surface interactions at the atomic scale for patterning metals
Author:
Affiliation:
1. Department of Chemical and Biomolecular Engineering, University of California Los Angeles, Los Angeles, California 90095
Funder
Semiconductor Research Corporation (SRC)
Lam Research Corporation (Lam Research)
Publisher
American Vacuum Society
Subject
Surfaces, Coatings and Films,Surfaces and Interfaces,Condensed Matter Physics
Link
http://avs.scitation.org/doi/pdf/10.1116/1.4993602
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