A multilayer, high resolution, ion‐bombardment‐tolerant electron resist system
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Published:1981-11
Issue:4
Volume:19
Page:1308-1312
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ISSN:0022-5355
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Container-title:Journal of Vacuum Science and Technology
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language:en
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Short-container-title:Journal of Vacuum Science and Technology
Author:
Hunt B. D.,Buhrman R. A.
Publisher
American Vacuum Society
Subject
General Engineering
Cited by
9 articles.
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