High-rate deposition of biaxially textured yttria-stabilized zirconia by dual magnetron oblique sputtering-Reference-Cited by-同舟云学术

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High-rate deposition of biaxially textured yttria-stabilized zirconia by dual magnetron oblique sputtering

Published:1999-09 Issue:5 Volume:17 Page:2826-2829
ISSN:0734-2101
Container-title:Journal of Vacuum Science & Technology A: Vacuum, Surfaces, and Films
language:en
Short-container-title:Journal of Vacuum Science & Technology A: Vacuum, Surfaces, and Films

Author:

Kaufman D. Y.,DeLuca P. M.,Tsai T.,Barnett S. A.

Publisher

American Vacuum Society

Subject

Surfaces, Coatings and Films,Surfaces and Interfaces,Condensed Matter Physics

Link

http://avs.scitation.org/doi/pdf/10.1116/1.581949

Cited by 5 articles. 订阅此论文施引文献订阅此论文施引文献，注册后可以免费订阅5篇论文的施引文献，订阅后可以查看论文全部施引文献

1. Influence of target–substrate distance and composition on the preferential orientation of yttria-stabilized zirconia thin films;Thin Solid Films;2012-05

2. Control of in-plane and out-of-plane texture in shear mode piezoelectric ZnO films by ion-beam irradiation;Journal of Applied Physics;2007-08-15

3. Effective biaxial modulus of ideally (hkl)-fiber-textured hexagonal, tetragonal, and orthorhombic films;Journal of Applied Physics;2006-11

4. A model for the development of biaxial alignment in yttria stabilized zirconia layers, deposited by unbalanced magnetron sputtering;Surface and Coatings Technology;2004-10

5. Modification of Thin Film Growth using Glancing-Angle Ions;MRS Proceedings;1999

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