Simple method for determining the internal volume of a vacuum system
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Published:1976-09
Issue:5
Volume:13
Page:1108-1109
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ISSN:0022-5355
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Container-title:Journal of Vacuum Science and Technology
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language:en
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Short-container-title:Journal of Vacuum Science and Technology
Author:
Lee C‐O,Peavey J. H.
Publisher
American Vacuum Society
Subject
General Engineering
Cited by
3 articles.
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