Preparation of strontium titanate thin film on Si substrate by radio frequency magnetron sputtering-Reference-Cited by-同舟云学术

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Preparation of strontium titanate thin film on Si substrate by radio frequency magnetron sputtering

Published:1992-01 Issue:1 Volume:10 Page:87-91
ISSN:0734-2101
Container-title:Journal of Vacuum Science & Technology A: Vacuum, Surfaces, and Films
language:en
Short-container-title:Journal of Vacuum Science & Technology A: Vacuum, Surfaces, and Films

Author:

Cho Neung‐Ho,Nam Seung‐Hee,Kim Ho‐Gi

Publisher

American Vacuum Society

Subject

Surfaces, Coatings and Films,Surfaces and Interfaces,Condensed Matter Physics

Link

http://avs.scitation.org/doi/pdf/10.1116/1.578071

Cited by 19 articles. 订阅此论文施引文献订阅此论文施引文献，注册后可以免费订阅5篇论文的施引文献，订阅后可以查看论文全部施引文献

1. Influence of aging on the resistive switching behavior of epitaxial strontium titanate based heterostructures;Materials Today: Proceedings;2022

2. High-K strontium titanate and lanthanum nickelate based epitaxial heterostructures and their structural characterization;2020 5th IEEE International Conference on Emerging Electronics (ICEE);2020-11-26

3. Structural and optical properties of low energy nitrogen ion implanted SrTiO3 thin films;AIP Conference Proceedings;2017

4. Characteristics of SrTiO 3 thin films deposited on Si by rf magnetron sputtering at various substrate temperatures;Philosophical Magazine B;2002-05-20

5. Electrical characterisation of SrTiO3/Si interfaces;Journal of Non-Crystalline Solids;2002-05

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