Author:
Czaplewski David A.,Ocola Leonidas E.
Subject
Materials Chemistry,Electrical and Electronic Engineering,Surfaces, Coatings and Films,Process Chemistry and Technology,Instrumentation,Electronic, Optical and Magnetic Materials
Cited by
3 articles.
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1. Development characteristics of polymethyl methacrylate in alcohol/water mixtures: a lithography and Raman spectroscopy study;Nanotechnology;2015-12-10
2. Nanochannel fabrication based on double patterning with hydrogen silsesquioxane;Journal of Vacuum Science & Technology B, Nanotechnology and Microelectronics: Materials, Processing, Measurement, and Phenomena;2015-03
3. Influence of secondary electrons in high-energy electron beam lithography;Journal of Vacuum Science & Technology B, Nanotechnology and Microelectronics: Materials, Processing, Measurement, and Phenomena;2013-01