Plasma and X-UV source characteristics for Al targets heated by 40 ns Nd-laser pulses
-
Published:2001
Issue:4
Volume:19
Page:1241
-
ISSN:0734-211X
-
Container-title:Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures
-
language:en
-
Short-container-title:J. Vac. Sci. Technol. B
Author:
Whitlock Robert R.,Greig J. R.,Nagel David J.,Topscher Stephen J.
Publisher
American Vacuum Society
Subject
General Engineering