Mechanism of columnar microstructure growth in titanium oxide thin films deposited by ion-beam assisted deposition-Reference-Cited by-同舟云学术

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Mechanism of columnar microstructure growth in titanium oxide thin films deposited by ion-beam assisted deposition

Published:1999-11 Issue:6 Volume:17 Page:3379-3384
ISSN:0734-2101
Container-title:Journal of Vacuum Science & Technology A: Vacuum, Surfaces, and Films
language:en
Short-container-title:Journal of Vacuum Science & Technology A: Vacuum, Surfaces, and Films

Author:

Tang Qi,Kikuchi Kazuo,Ogura Shigetaro,Macleod Angus

Publisher

American Vacuum Society

Subject

Surfaces, Coatings and Films,Surfaces and Interfaces,Condensed Matter Physics

Link

http://avs.scitation.org/doi/pdf/10.1116/1.582069

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5. Arc Vapour Deposition of Iron Film during Magnetron Sputtering of Ti Film: Effect of Substrate’s Materials and Surface Roughness;International Journal of Electrochemical Science;2015-07

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