Improved abrasion resistance of silica-based CVD thin films on polycarbonate substrates for automotive applications-Reference-Cited by-同舟云学术

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Improved abrasion resistance of silica-based CVD thin films on polycarbonate substrates for automotive applications

Published:2021-07 Issue:4 Volume:39 Page:040602
ISSN:2166-2746
Container-title:Journal of Vacuum Science & Technology B
language:en
Short-container-title:Journal of Vacuum Science & Technology B

Author:

Tanaka Sae¹^ORCID,Endo Hayate²,Shirakura Akira¹,Kudo Shinya¹,Suzuki Tetsuya¹

Affiliation:

1. Center for Science of Environment, Resources and Energy, Graduate School of Science and Technology, Keio University, 3-14-1 Hiyoshi, Kohoku-ku, Yokohama 223-8522, Japan

2. Research and Development Division, DaikyoNishikawa Corporation, 5-1 Jike Industrial Park, Higashi Hiroshima City, Hiroshima Prefecture 739-0049, Japan

Publisher

American Vacuum Society

Subject

Materials Chemistry,Electrical and Electronic Engineering,Surfaces, Coatings and Films,Process Chemistry and Technology,Instrumentation,Electronic, Optical and Magnetic Materials

Link

https://avs.scitation.org/doi/pdf/10.1116/6.0001040

Cited by 2 articles. 订阅此论文施引文献订阅此论文施引文献，注册后可以免费订阅5篇论文的施引文献，订阅后可以查看论文全部施引文献

1. Separation of toxic contaminants from water by silica aerogel-based adsorbents: A comprehensive review;Journal of Water Process Engineering;2023-07

2. The Effect of the Process Parameters on the Growth Rate and Composition of the Anti Scratch Films Deposited from TEOS by AP-PECVD on Polycarbonate;Plasma Chemistry and Plasma Processing;2023-04-18

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