High fidelity blazed grating replication using nanoimprint lithography-Reference-Cited by-同舟云学术

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High fidelity blazed grating replication using nanoimprint lithography

Published:2004 Issue:6 Volume:22 Page:3260
ISSN:0734-211X
Container-title:Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures
language:en
Short-container-title:J. Vac. Sci. Technol. B

Author:

Chang Chih-Hao,Montoya J. C.,Akilian M.,Lapsa A.,Heilmann R. K.,Schattenburg M. L.,Li M.,Flanagan K. A.,Rasmussen A. P.,Seely J. F.,Laming J. M.,Kjornrattanawanich B.,Goray L. I.

Publisher

American Vacuum Society

Subject

General Engineering

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