Mirror-finished, surface-seal-type gate valve with a long life of about 104 cycles
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Published:1997-07
Issue:4
Volume:15
Page:2388-2390
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ISSN:0734-2101
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Container-title:Journal of Vacuum Science & Technology A: Vacuum, Surfaces, and Films
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language:en
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Short-container-title:Journal of Vacuum Science & Technology A: Vacuum, Surfaces, and Films
Author:
Satou M.,Momose T.,Tamura K.,Ishimaru H.
Publisher
American Vacuum Society
Subject
Surfaces, Coatings and Films,Surfaces and Interfaces,Condensed Matter Physics