Oxygen-free palladium/titanium coating, a novel nonevaporable getter coating with an activation temperature of 133 °C-Reference-Cited by-同舟云学术

Oxygen-free palladium/titanium coating, a novel nonevaporable getter coating with an activation temperature of 133 °C

Published:2018-09 Issue:5 Volume:36 Page:051601
ISSN:0734-2101
Container-title:Journal of Vacuum Science & Technology A
language:en
Short-container-title:Journal of Vacuum Science & Technology A

Author:

Miyazawa Tetsuya¹,Kurihara Masashi²,Ohno Shinya²,Terashima Naoya³,Natsui Yuto³,Kato Hiroo³,Kato Yoshihiro⁴,Hashimoto Ayako⁵⁶,Kikuchi Takashi⁷,Mase Kazuhiko⁷

Affiliation:

1. School of High Energy Accelerator Science, SOKENDAI, 1-1 Oho, Tsukuba 305-0801, Japan

2. Graduate School of Engineering, Yokohama National University, 79-5 Tokiwadai, Hodogaya-ku, Yokohama 240-8501, Japan

3. Graduate School of Science and Technology, Hirosaki University, 3 Bunkyocho, Hirosaki 036-8561, Japan

4. Irie Koken Co., Ltd., 740-5 Shimoakasaka, Kawagoe, Saitama 350-1155, Japan

5. National Institute for Materials Science, 1-2-1 Sengen, Tsukuba 305-0047, Japan

6. Graduate School of Pure and Applied Sciences, University of Tsukuba, 1-2-1 Sengen, Tsukuba 305-0047, Japan

7. Institute of Materials Structure Science, KEK, 1-1 Oho, Tsukuba 305-0801, Japan

Funder

Japan Society for the Promotion of Science

Publisher

American Vacuum Society

Subject

Surfaces, Coatings and Films,Surfaces and Interfaces,Condensed Matter Physics

Link

http://avs.scitation.org/doi/pdf/10.1116/1.5037023

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