Effects of sputtering process on the thermochromic function of vanadium dioxide thin films-Reference-Cited by-同舟云学术

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Effects of sputtering process on the thermochromic function of vanadium dioxide thin films

Published:2022-01 Issue:1 Volume:40 Page:013403
ISSN:0734-2101
Container-title:Journal of Vacuum Science & Technology A
language:en
Short-container-title:Journal of Vacuum Science & Technology A

Author:

Li Chuan¹²^ORCID,Hsieh Jang Hsing³^ORCID,Su Chuan Ming¹,Chang Nai-Yun¹

Affiliation:

1. Department of Biomedical Engineering, National Yang Ming Chiao Tung University, Taipei 11221, Taiwan

2. Department of Mechanical Engineering, National Central University, Jhongli, Taoyuan 32001, Taiwan

3. Department of Materials Engineering, Ming Chi University of Technology, Taishan, Taipei 24301, Taiwan

Funder

Ministry of Science and Technology, Taiwan

Publisher

American Vacuum Society

Subject

Surfaces, Coatings and Films,Surfaces and Interfaces,Condensed Matter Physics

Link

https://avs.scitation.org/doi/pdf/10.1116/6.0001404

Cited by 4 articles. 订阅此论文施引文献订阅此论文施引文献，注册后可以免费订阅5篇论文的施引文献，订阅后可以查看论文全部施引文献

1. Thickness Effect on Electro-Optical Characteristics of RF Magnetron Sputtered MoS2/p-Si heterojunction Devices Fabricated by Aerosol Jet Printing;Silicon;2023-04-14

2. Enhancement of phase transition properties of ultrathin VO2 thin films on microsphere array by vacuum thermal pre-annealing;Thin Solid Films;2023-04

3. A comparative study of the thermochromic performances of VO2 films obtained by air oxidation of V and VN precursors;Solar Energy Materials and Solar Cells;2022-12

4. Preface for the special topic collection honoring Dr. Scott Chambers’ 70th birthday and his leadership in the science and technology of oxide thin films;Journal of Vacuum Science & Technology A;2022-07

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