Measurements and modeling of the impact of weak magnetic fields on the plasma properties of a planar slot antenna driven plasma source
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Published:2015-05
Issue:3
Volume:33
Page:031303
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ISSN:0734-2101
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Container-title:Journal of Vacuum Science & Technology A: Vacuum, Surfaces, and Films
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language:en
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Short-container-title:Journal of Vacuum Science & Technology A: Vacuum, Surfaces, and Films
Author:
Yoshikawa Jun,Susa Yoshio,Ventzek Peter L. G.
Publisher
American Vacuum Society
Subject
Surfaces, Coatings and Films,Surfaces and Interfaces,Condensed Matter Physics