Combined ToF-SIMS and AFM protocol for accurate 3D chemical analysis and data visualization-Reference-Cited by-同舟云学术

Combined ToF-SIMS and AFM protocol for accurate 3D chemical analysis and data visualization

Published:2018-05 Issue:3 Volume:36 Page:03F122
ISSN:2166-2746
Container-title:Journal of Vacuum Science & Technology B, Nanotechnology and Microelectronics: Materials, Processing, Measurement, and Phenomena
language:en
Short-container-title:Journal of Vacuum Science & Technology B, Nanotechnology and Microelectronics: Materials, Processing, Measurement, and Phenomena

Author:

Moreno Maiglid A.¹,Mouton Isabelle¹,Chevalier Nicolas¹,Barnes Jean-Paul¹,Bassani Franck²,Gautier Brice³

Affiliation:

1. Univ. Grenoble Alpes, CEA, LETI, 38000 Grenoble, France

2. Université Grenoble Alpes, F-38000 Grenoble, France and CNRS-LTM, F-38000 Grenoble, France

3. INSA Lyon, Institut des Nanotechnologies de Lyon, UMR CNRS 5270, Université de Lyon, F-69621 Villeurbanne Cedex, France

Funder

EC | Horizon 2020 Framework Programme

Publisher

American Vacuum Society

Subject

Materials Chemistry,Electrical and Electronic Engineering,Surfaces, Coatings and Films,Process Chemistry and Technology,Instrumentation,Electronic, Optical and Magnetic Materials

Link

http://avs.scitation.org/doi/pdf/10.1116/1.5019464

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