Experimental study of the influence of nanoparticle generation on the electrical characteristics of argon–silane capacitive radio-frequency plasmas-Reference-Cited by-同舟云学术

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Experimental study of the influence of nanoparticle generation on the electrical characteristics of argon–silane capacitive radio-frequency plasmas

Published:2002-01 Issue:1 Volume:20 Page:153-159
ISSN:0734-2101
Container-title:Journal of Vacuum Science & Technology A: Vacuum, Surfaces, and Films
language:en
Short-container-title:Journal of Vacuum Science & Technology A: Vacuum, Surfaces, and Films

Author:

Shen Zhe,Kortshagen Uwe

Publisher

American Vacuum Society

Subject

Surfaces, Coatings and Films,Surfaces and Interfaces,Condensed Matter Physics

Link

http://avs.scitation.org/doi/pdf/10.1116/1.1427894

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