Pulsed metal ion source by triggerless shunting arc discharge-Reference-Cited by-同舟云学术

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Pulsed metal ion source by triggerless shunting arc discharge

Published:1999 Issue:2 Volume:17 Page:871
ISSN:0734-211X
Container-title:Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures
language:en
Short-container-title:J. Vac. Sci. Technol. B

Author:

Yukimura Ken,Isono Ryota,Monguchi Toshihide,Yoshioka Kenji,Masamune Sadao

Publisher

American Vacuum Society

Subject

General Engineering

Cited by 35 articles. 订阅此论文施引文献订阅此论文施引文献，注册后可以免费订阅5篇论文的施引文献，订阅后可以查看论文全部施引文献

1. Special Arc Modes with Reduced Macroparticle Emission;Tetrahedrally Bonded Amorphous Carbon Films I;2018

2. Induction of Gaseous and Metal Source Plasmas by Carbon Shunting Arc;IEEE Transactions on Plasma Science;2011-11

3. Shunting arc generation by parallel rod configuration;Plasma Sources Science and Technology;2011-01-07

4. High-Power Pulsed Magnetron Sputtering Glow Plasma in Argon Gas and Pulsed Ion Extraction;IEEE Transactions on Plasma Science;2010-11

5. Production of Titanium-Containing Carbon Plasma Using Shunting Arc Discharge for Hybrid Film Deposition;Japanese Journal of Applied Physics;2010-04-20

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