Study of space-charge devices for focused ion beam systems
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Published:1995-11
Issue:6
Volume:13
Page:2414
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ISSN:0734-211X
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Container-title:Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures
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language:
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Short-container-title:J. Vac. Sci. Technol. B
Publisher
American Vacuum Society
Subject
General Engineering
Cited by
3 articles.
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1. Notes and References;Principles of Electron Optics;2018
2. Spherical aberration corrector using space charge;Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures;1997-11
3. Modeling and design of space charge lenses/aberration correctors for focused ion beam systems;Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures;1996-01