Anisotropic microstructure of physical vapor deposited coatings caused by anisotropy in flux distribution of arriving atoms
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Published:2007-07
Issue:4
Volume:25
Page:1184-1187
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ISSN:0734-2101
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Container-title:Journal of Vacuum Science & Technology A: Vacuum, Surfaces, and Films
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language:en
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Short-container-title:Journal of Vacuum Science & Technology A: Vacuum, Surfaces, and Films
Author:
Grachev S. Yu.,Kamminga J.-D.,Janssen G. C. A. M.,Smy T.,Tichelaar F. D.
Publisher
American Vacuum Society
Subject
Surfaces, Coatings and Films,Surfaces and Interfaces,Condensed Matter Physics