Directional etch of magnetic and noble metals. I. Role of surface oxidation states
Author:
Affiliation:
1. Department of Chemical and Biomolecular Engineering, University of California Los Angeles, Los Angeles, California 90095
Publisher
American Vacuum Society
Subject
Surfaces, Coatings and Films,Surfaces and Interfaces,Condensed Matter Physics
Link
http://avs.scitation.org/doi/pdf/10.1116/1.4983829
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